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In 1590 the first early microscope was made by two eyeglass makers by putting two lenses in a tube
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The First Compound Microscope was Invented by Ernst Abbe and Carl Zeiss.
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The electron mircroscope is a microscope with high magnification making electron beams in place of light and using electron lenses but fist he showed how magnetic coils could act as an electron lens, and use several coils in a series to build the microscope in 1931
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Scanning Electron Microscope is a type of electron microscope. The surface of a specimen is scanned by a beam of electrons that are reflected to form an image.
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Scanning tunneling microscope is a microscope used for imaging surfaces at the atomic level. The scanning tunneling microscope is a high-resolution microscope that doesn't use light or an electron beam but with a ultrafine tip that can reveal an atomic and molecular details of a surface