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MEMS Begins
The first microsystems research starts in the original Durham cleanroom -
Wolfson Funding
Mike Petty and David Wood had the join their organic electronics and microsystems groups to apply for funding of a joint facility -
The Vision
Building work starts on the new cleanroom and Durham County Council and ONENE invest in equipment and projects to help the local economy -
A New Era
The Level 4 Molecular Electronics and Microsystems (MEMS) opens -
Return of the King
Sir David King returns for a second visit to look how the money invested has allowed growth in the area -
A time of growth
A wolfson funded grant allows a further extension of the cleanroom to allow introduction of a range of new equipment (including an RIE / Sputter System / Test equipment) -
Expansion of Collaborations
Continued growth during this period led to a number of collaborations inc. ViperRF, Labman, Newcastle University IBEX. -
Going Nano
University funding lead to the addition of a e-beam lithography system, an atomic layer deposition system and a cluster deposition system comprising both e-beam and sputter deposition capabilities. -
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The story continues....
Work with Northumrbria University, Oxford university, Senstronics, The Scottish Microelectronics Centre and Pragmatic Printing all helped firm up the facilities position at the forefront of delivering on device fabrication projects. -
COVID
In 2020, the world changed with the global pandemic. However, despite significant complexity, the labs were kept accessible at a low level to allow research work to continue -
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Investment
Investment and upgrade was made of all the LEV systems relating to the lab, to extend its lifetime going forwards -
Re-opening
While down time caused many issues, the cleanroom and associated labs are now back to deliver on those projects and collaborations.