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TEM invented by Ernst Ruska and Max Knoll
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Norio Taniguchi coins nano-technology
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Heinrich Rohrer invents STM
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Richard Smalley, Robert Curl and Harold Kroto discover bucky ball
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AFM invented
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Eric Drexler independently uses "nanotechnology" in Engines of Creation: The Coming Era of Nanotechnology
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Bill Clinton starts National Nanotechnology Initiative
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George Bush signs Nanotechnology Research and Development Act