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The first part of the theory states that all matter is made of atoms. The second part states that all atoms of an element are identical in mass and properties. The third part states that compounds are combinations of 2 or more different types of atoms
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Einstein wrote an equation to prove the existence of atoms, and to figure out their weight and the amount needed in a chemical reaction. Jean Perrin used this equation to solidify the existence of atoms.
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A group of engineers built the first Scanning Tunnelling microscope and took the first image of atoms.
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A group led by Ara Apkarian made a modified Scanning Tunnelling microscope that used light to see atoms which led to a photo of a single atom being taken. This proved the existence of atoms.